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Products

Active Anti-Vibration System

RSA Series

Features

  • Active Vibration Isolation Platform with Resonance Elimination
  • No additional air supply required — easy installation and relocation
  • Excellent vibration isolation performance in the low-frequency range

Key Specifications※ Custom Specifications Available

Model RSA-0405 RSA-0506 RSA-0607 RSA-0708
size (mm) 396 x 496 x 110 496 x 596 x 110 596 x 696 x 110 396 x 496 x 110
Weight (Kg) 23 37 65 85
Maximum Load (Kg) Max. 60 Max. 150 Max. 200 Max. 300
Top Plate Type Aluminum (Standard) / H-6 Optical Board (Optional)
Control Frequency (Hz) 0.5 ~ 1,000
Control Degrees of Freedom 3-Axis, 6-Degree-of-Freedom Control (Full Active System)
Applications Desktop-Type Active Vibration Isolation System Active Vibration Isolation System for Heavy-Load Nano Metrology Instruments
Isolation Performance
-1 Hz Resonance-Free
2 Hz -10dB(60% Vibration Isolation)
5 Hz -30dB(95% Vibration Isolation)
10 Hz -35 ~ -40dB(99% Vibration Isolation)

Application

  • Digital Microscopes, Laser Microscopes, Benchtop Interferometers, Non-Contact 3D Measuring Instruments
  • Benchtop SEM, AFM, STM, XRF, Probe Stations, Thin-Film Thickness Measurement Instruments
  • Cell Injection, Cell Manipulation, Mass Spectrometer
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