Active Anti-Vibration System
RSA Series
Features
- Active Vibration Isolation Platform with Resonance Elimination
- No additional air supply required — easy installation and relocation
- Excellent vibration isolation performance in the low-frequency range
Key Specifications※ Custom Specifications Available
| Model |
RSA-0405 |
RSA-0506 |
RSA-0607 |
RSA-0708 |
| size (mm) |
396 x 496 x 110 |
496 x 596 x 110 |
596 x 696 x 110 |
396 x 496 x 110 |
| Weight (Kg) |
23 |
37 |
65 |
85 |
| Maximum Load (Kg) |
Max. 60 |
Max. 150 |
Max. 200 |
Max. 300 |
| Top Plate Type |
Aluminum (Standard) / H-6 Optical Board (Optional) |
| Control Frequency (Hz) |
0.5 ~ 1,000 |
| Control Degrees of Freedom |
3-Axis, 6-Degree-of-Freedom Control (Full Active System) |
| Applications |
Desktop-Type Active Vibration Isolation System |
Active Vibration Isolation System for Heavy-Load Nano Metrology Instruments |
Application
- Digital Microscopes, Laser Microscopes, Benchtop Interferometers, Non-Contact 3D Measuring Instruments
- Benchtop SEM, AFM, STM, XRF, Probe Stations, Thin-Film Thickness Measurement Instruments
- Cell Injection, Cell Manipulation, Mass Spectrometer
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