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Products

Low-Profile Vibration Isolation Platform

RSL Series

Main Features

High performance low-profile vibration isolation platform suitable for large equipment with high weight and
Providing optimized total solution considering equipment specifications such as shape and weight etc. of large equipment
  • - The vibration isolation top plate with characteristics of high strength and vibration damping customized to the weight and size of the equipment
  • - Omnidirectional vibration isolation ability optimized according to equipment weight and leveling by possessing various isolator technologies
  • - An isolator equipped with a self-developed special air spring, which has excellent vibration suppression ability even on weak ground
Cradle Platform: High performance low-profile vibration isolation platform suitable for cases where the center of gravity is at the top
Base platform: High performance low-profile vibration isolation platform suitable for high weight equipment

Main Specification※ Custom Orders Available

Model RSLC Series RSLB Series
Natural Frequency General type: 1.0~1.2Hz (Vertical)/ 1.5~1.8Hz (Horizontal) Special type: 0.7~1.0Hz(Vertical)/ 1.0~1.2Hz (Horizontal)
Leveling type Auto Leveling System by 3-Point Leveling Valve Repeatability : ±0.1mm
Vibration Isolation Pneumatic Isolation Type
Top plate material Conductive tile top plate of surface plate, honeycomb and layered structure / Frame: Steel, AI, Stainless
Load weight (kg) 0 ~ 10,000Kg
Operation Compressed air or nitrogen gas

Application

  • 1. FE-SEM, TEM, FIB
  • 2. Stepper, Mask Aligner, Disk Testing Spin Stand
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