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Products

VIBRATION ISOLATION MOUNT

RSi Series

Main Features

  • It can be easily installed and used at the bottom of heavy equipment
  • A vibration isolation control device suitable for X-Y stage transfer of high precision measurement/inspection equipment
  • High precision repeatability and excellent leveling are possible even at high-speed transfer of the X-Y stage
  • High performance vibration isolation function in vertical/horizontal direction

Main Specification※ Custom Orders Available

Model RSi Series
Natural Frequency Vertical: 1.0~1.5Hz/ Oil Damper: 2.0~2.3Hz Horizontal: 1.5~1.8Hz/ Oil Damper: 2.0~2.5Hz
Leveling type Auto Leveling System by 3-Point Leveling Valve Repeatability : ±0.05mm / ±0.1mm
Damping method Air Damping by Orifice
Operation 4 ~ 6kg/cm2 Compressed air or nitrogen gas

Application

  • Semiconductor/Large format display measurements/Inspection equipment
  • High precision optical measurement/Laser equipment
  • Other high precision measuring instruments
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